Wafer Fabrication 1

Wafer Fabrication

Zhang, Jie

Category

Subject

Publisher

ISBN

9783110486902

Format

Hardback

Price

$145.93000 $109.45000

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(Hardback | 272 pages)

Summary

This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.